Model-independent method for the determination of guiding thin-film optical parameters.
نویسندگان
چکیده
A method for the determination of the optical constants of thin films based on the combination of a waveguide measurement procedure with the spectroscopic measurements made from the UV to the IR is presented. As a test material AlN thin film on sapphire substrates is investigated.
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عنوان ژورنال:
- Applied optics
دوره 45 23 شماره
صفحات -
تاریخ انتشار 2006